Verfahren zum Stabilisieren der Strahllage und Lasersystem mit Strahllagebestimmung

• Main Authors: Scharun, Michael, Bauer, Dominik, Häfner, Stephan, Vogel, Jürgen, Aiple, Fabian, Dannecker, Benjamin, Dominik, Johanna
• Format: Patent
• Language: German
• Published: 31.08.2023
• Subjects: CLADDING OR PLATING BY SOLDERING OR WELDING; COLORIMETRY; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; MACHINE TOOLS; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; RADIATION PYROMETRY; SOLDERING OR UNSOLDERING; TESTING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

Die vorliegende Erfindung betrifft Verfahren und zum Stabilisieren der Strahllage eines Laserstrahls eines Lasers, umfassend das Messen der Intensitätsverteilung (12) des Laserstrahls (10) mit einem Strahllagesensor (2) in der Strahllagesensorebene (200), die Bestimmung der Ist-Strahllage (122) des Laserstrahls (10) in der Strahllagesensorebene (200) aus der gemessenen Intensitätsverteilung (12) und das Korrigieren der Abweichung der Ist-Strahllage (122) des Laserstrahls (10) von der Soll-Strahllage (124) des Laserstrahls (10), wobei der Strahllagesensor (2) ein zweidimensional aufgelöstes Sensorarray mit Sensorzellen (20) ist, sowie ein entsprechendes Lasersystem (100). The present invention relates to a method for stabilising the beam position of a laser beam of a laser, the method comprising: measuring the intensity distribution (12) of the laser beam (10) using a beam-position sensor (2) in the beam-position sensor plane (200); determining the actual beam position (122) of the laser beam (10) in the beam-position sensor plane (200) from the measured intensity distribution (12); and correcting the deviation of the actual beam position (122) of the laser beam (10) from the target beam position (124) of the laser beam (10); wherein the beam-position sensor (2) is a two-dimensionally resolved sensor array having sensor cells (20). The invention also relates to a corresponding laser system (100).