Optisches Phasenarray, LiDAR-System mit optischem Phasenarray und Verfahren zum Bearbeiten eines optischen Phasenarrays

• Main Authors: Schmid, Marc, Menold, Tobias Joachim, Huebel, Alexander, Amthor, Julia
• Format: Patent
• Language: German
• Published: 07.06.2023
• Subjects: ANALOGOUS ARRANGEMENTS USING OTHER WAVES; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES; MEASURING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; RADIO DIRECTION-FINDING; RADIO NAVIGATION; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TESTING

Ein optisches Phasenarray (1) weist eine Sende- und/oder Empfangsfläche (7) mit einer regelmäßigen Anordnung von wellenleitenden Antennen (8) auf. Elektromagnetische Strahlung ist aus den Antennen (8) auskoppelbar und/oder in die Antennen (8) einkoppelbar. Zumindest eine Antenne (8) weist zumindest teilweise amorphes Silizium auf. An optical phase array. The optical phase array includes a sending and/or receiving surface with a regular arrangement of waveguiding antennas. Electromagnetic radiation is decoupleable from the antennas and/or coupleable into the antennas. At least one antenna includes at least partially amorphous silicon.