Beförderungsvorrichtung zum Befördern mindestens eines Wafers

• Main Authors: Verhelst, Bas, Raatz, Heike
• Format: Patent
• Language: German
• Published: 19.12.2019
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

Die Erfindung betrifft eine Beförderungsvorrichtung (10) zum Befördern mindestens eines Wafers (36), mit zumindest einem Transportkörper (200), wobei der Transportkörper (200) zumindest zum Tragen oder zum Halten eines Wafers (36) eingerichtet ist und wobei die Beförderungsvorrichtung (10) dazu eingerichtet ist, den zumindest einen Transportkörper (200) zumindest zweidimensional auf einer Beförderungsfläche (35) zu bewegen. A conveying device includes a transport body configured to carry or hold a wafer, and a stator relative to which the conveying device is designed to move the transport body at least two-dimensionally on a conveying surface. The stator includes several movably arranged actuating magnets, each of which is connected to the stator via an actuating element, and the actuating element is configured to change a position and/or an orientation of the connected actuating magnets relative to the stator. The transport body includes at least two stationary magnets which are connected to the transport body such that the stationary magnets are immovable relative to the transport body, and the stator and the transport body are magnetically coupled by the stationary magnets and the actuating magnets. The device conveys the transport body relative to the stator by controlled positioning and/or orientation of the actuating magnets via the actuating elements.