Gassensor, Feuchtigkeitssensor und Verfahren zum Ausbilden einer Sensorschicht

• Main Authors: Ruhl, Günther, Zöpfl, Alexander, Bachl, Florian, König, Matthias
• Format: Patent
• Language: German
• Published: 14.12.2017
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; METALLURGY; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TESTING

Verschiedene Ausführungsformen beziehen sich auf einen Gassensor (400), der Folgendes umfasst: einen Träger (302), eine Elektrodenstruktur (406); und eine Sensorschicht (304) in Kontakt mit der Elektrodenstruktur (406), wobei die Sensorschicht (304) turbostratischen Graphit umfasst oder im Wesentlichen daraus besteht. Various embodiments relate to a gas sensor, including: a carrier, an electrode structure; and a sensor layer in contact with the electrode structure, wherein the sensor layer includes or essentially consists of turbostratic graphite.