NANORÖHRENSTRUKTUR-BASIERTER METALL-DAMASZENER-PROZESS

• Main Authors: STEINBRENNER, JÜRGEN, JOSHI, RAVI KESHAV
• Format: Patent
• Language: German
• Published: 30.07.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MANUFACTURE OR TREATMENT THEREOF; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS; NANOTECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; SEMICONDUCTOR DEVICES; TRANSPORTING

In verschiedenen Ausführungsformen wird ein Verfahren zum Herstellen einer Metallisierungsschicht (114) auf einem Substrat (100) bereitgestellt, wobei das Verfahren das Ausbilden einer Mehrzahl von Gruppen (116) von Nanoröhren (106) über einem Substrat (100), wobei die Gruppen (116) von Nanoröhren (106) so angeordnet sein können, dass ein Abschnitt des Substrats (100) freigelegt ist, und das Ausbilden von Metall (114) über dem freigelegten Abschnitt (112) des Substrats (100) zwischen der Mehrzahl von Gruppen (116) von Nanoröhren (106) aufweisen kann. In various embodiments a method for manufacturing a metallization layer on a substrate is provided, wherein the method may include providing a structured layer of a catalyst material on the substrate, the catalyst material may include a first layer of material arranged over the substrate and a second layer of material arranged over the first layer of material, wherein the structured layer of catalyst material having a first set of regions including the catalyst material over the substrate and a second set of regions free of the catalyst material over the substrate, and forming a plurality of groups of nanotubes over the substrate, each group of the plurality of groups of nanotubes includes a plurality of nanotubes formed over a respective region in the first set of regions.