Optical beam splitter of polarization measurement device used in projection exposure system, has beam splitting surface for splitting incoming light beam reflected at beam splitting surface of beam portion and has curved form

The optical beam splitter has a beam splitting surface for splitting an incoming light beam reflected at the beam splitting surface of beam portion. The beam splitting surface has partially curved form. A rotary portion is formed by rotation of a concave curve. Independent claims are included for th...

Full description

Saved in:
Bibliographic Details
Main Authors SAENGER, INGO, SCHLESENER, FRANK
Format Patent
LanguageEnglish
German
Published 30.01.2014
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:The optical beam splitter has a beam splitting surface for splitting an incoming light beam reflected at the beam splitting surface of beam portion. The beam splitting surface has partially curved form. A rotary portion is formed by rotation of a concave curve. Independent claims are included for the following: (1) a polarization measurement device; (2) a reticle for a projection exposure system; and (3) a projection exposure system. Ein optischer Strahlteiler (44) umfasst eine strahlteilende Fläche (50) zum Aufspalten eines eingehenden Lichtstrahls (56) in einen an der strahlteilenden Fläche reflektierten Teilstrahl (58) sowie einen die strahlteilende Fläche durchlaufenden Teilstrahl (60). Die strahlteilende Fläche weist zumindest abschnittsweise eine gekrümmte Form auf.
Bibliography:Application Number: DE201310200962