Verfahren und CSS-Reaktor zum kontinuierlichen Beschichten von Substraten

• Main Authors: Kreft, Norbert, Oelting, Dr., Stefan
• Format: Patent
• Language: German
• Published: 25.05.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Verfahren zum kontinuierlichen Beschichten mindestens eines Substrats (14) aufweisend zumindest die Schritte- Verdampfen mindestens eines Halbleitermaterials (16) in mindestens einem Tiegel (30) und- Abscheiden des Halbleitermaterials (16) auf dem Substrat, wobei der Tiegel (30) während des Abscheidens und/oder Verdampfens mit Halbleitermaterial (16) befüllt wird, dadurch gekennzeichnet, dass das Halbleitermaterial (16) zum Befüllen des Tiegels (30) in mindestens einer Schleusenkammer (54) erwärmt wird, bevor es in den Tiegel (30) gefüllt wird. The invention relates to a method for the continuous coating of at least one substrate 14 with a semiconductor material e.g. CdTe. To this end a semiconductor material is sublimated in at least one crucible 30 in order to deposit it on a substrate, e.g. a glass panel. If the crucible 30 is filled with semiconductor material (16) during the deposition and/or evaporation, the set-up time required otherwise is then eliminated. Preferably used for carrying out the method is a CSS reactor comprising a crucible, a guide for substrates and at least one lock through which the crucible can be refilled during evaporation of semiconductor material from the crucible.