Arrangement for vacuum coating of substrate, has transport support element and substrate support element arranged on substrate holder, and bars which are arranged between substrate support element and transport support element

• Main Authors: STEUER, CHRISTOPH, SENS, MARTIN, DSAAK, TORSTEN, KILIAN, MICHAEL, KRALAPP, UWE, HUMMEL, HENDRIK, MOSSHAMMER, STEFFEN, OBST, HENRIK, UHLEMANN, AIKO, FABER, JOERG, POLLACK, GERD, BARTH, SVEN
• Format: Patent
• Language: English; German
• Published: 19.01.2012
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The arrangement has a transport support element (4) and a substrate support element (3) arranged on a substrate holder. The bars (6) made of infrared radiation transparent material, are arranged between the substrate support element and transport support element, so as to form a honeycomb structure. The receiving side portion (8) of the substrate support element is parallel to transport side portion (9) of the transport support element. Der Erfindung, die eine Anordnung zu Beschichtung von Substraten nach der deutschen Patentanmeldung DE 10 2009 030 814 betrifft, liegt die Aufgabe zugrunde, eine Hinterschichtung von Substraten bei deren Vakuumbeschichtung ohne zusätzliche Mittel zumindest zu minimieren. Dies wird dadurch gelöst, dass eine die Substratauflage aufweisende Substrataufnahme, die eine auf ein Transportsystem auflegbare Transportauflage aufweist, selbst die Teilchenfalle bildet.