Transport roller for transportation of plate-shaped substrate in substrate treatment plant, has radiation protection arranged at roller end, and plate-shaped diaphragms transversely aligned to rotational axis of roller

The roller has a radiation protection arranged at a roller end (25). Plate-shaped diaphragms (72) are transversely aligned to a rotational axis of the roller. The two diaphragms are arranged parallel to each other at a distance. A spacer is arranged between the two adjacent diaphragms. The diaphragm...

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Bibliographic Details
Main Authors KLOOS, MATTHIAS, PUENSCH, THOMAS, MEYER, THOMAS
Format Patent
LanguageEnglish
German
Published 05.01.2012
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:The roller has a radiation protection arranged at a roller end (25). Plate-shaped diaphragms (72) are transversely aligned to a rotational axis of the roller. The two diaphragms are arranged parallel to each other at a distance. A spacer is arranged between the two adjacent diaphragms. The diaphragms are attached on a cuff (71) or clip. The roller end is attached with a bearing pin (26). An end cap (2) is formed with a bore (21). A rotationally symmetric roller body (1) is made of a ceramic material. The end cap is made of stainless steel. The diaphragm is made of stainless steel and ceramic material. Die Erfindung betrifft eine Transportrolle mit einem Strahlungsschutz, die vorteilhaft in einer Transporteinrichtung zum Transport von Substraten in Substratbehandlungsanlagen verwendet werden kann. Bei einer Transportrolle, die einen rotationssymmetrischen Rollenkörper und mindestens ein Rollenende umfasst, wird vorgeschlagen, dass am Rollenende ein Strahlungsschutz angeordnet ist, der mindestens eine quer zur Drehachse der Transportrolle ausgerichtete, plattenförmige Blende umfasst.
Bibliography:Application Number: DE20101030782