Verfahren zur Herstellung einer strukturierten Bodenelektrode in einem piezoelektrischen Bauelement

The method involves providing a base material (100), and producing a laminated structure (133) on the base material, where the structure has a conductive material. A protective layer (140) is produced on the structure. A planarization layer is applied on the layer (140) and the base material. A sect...

Full description

Saved in:
Bibliographic Details
Main Authors FATTINGER, GERNOT, DIEFENBECK, KLAUS
Format Patent
LanguageGerman
Published 03.01.2008
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
Online AccessGet full text

Cover

Abstract The method involves providing a base material (100), and producing a laminated structure (133) on the base material, where the structure has a conductive material. A protective layer (140) is produced on the structure. A planarization layer is applied on the layer (140) and the base material. A section of the layer (140) is formed by structuring of the planarization layer, where the layers are laterally adjoined and form a planar surface. The layer (140) and an appropriate part of the planarization layer are removed in order to obtain a planar surface of the layers.
AbstractList The method involves providing a base material (100), and producing a laminated structure (133) on the base material, where the structure has a conductive material. A protective layer (140) is produced on the structure. A planarization layer is applied on the layer (140) and the base material. A section of the layer (140) is formed by structuring of the planarization layer, where the layers are laterally adjoined and form a planar surface. The layer (140) and an appropriate part of the planarization layer are removed in order to obtain a planar surface of the layers.
Author DIEFENBECK, KLAUS
FATTINGER, GERNOT
Author_xml – fullname: FATTINGER, GERNOT
– fullname: DIEFENBECK, KLAUS
BookMark eNqNzDsOwjAQBFAXUPC7gxtKJPMJEm0gKAdAtJEVJsSKs47WdpPTYz4HoNqZ0dPOxYQcYSbqO7jRLYPkGFmWYB9gbaSnhCGw9IFjFyIbcEgodw8QLLrAKUlDH9bLwWB03934un1LHVPvQWEppo22HqvfXYj1tbidyw0GV8EPuk4vQ3Uptmqn1FFtT5nK8sP-X_cCrnNDFw
ContentType Patent
DBID EVB
DatabaseName esp@cenet
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
ExternalDocumentID DE102006019505B4
GroupedDBID EVB
ID FETCH-epo_espacenet_DE102006019505B43
IEDL.DBID EVB
IngestDate Fri Jul 19 15:00:56 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language German
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_DE102006019505B43
Notes Application Number: DE20061019505
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080103&DB=EPODOC&CC=DE&NR=102006019505B4
ParticipantIDs epo_espacenet_DE102006019505B4
PublicationCentury 2000
PublicationDate 20080103
PublicationDateYYYYMMDD 2008-01-03
PublicationDate_xml – month: 01
  year: 2008
  text: 20080103
  day: 03
PublicationDecade 2000
PublicationYear 2008
RelatedCompanies INFINEON TECHNOLOGIES AG
RelatedCompanies_xml – name: INFINEON TECHNOLOGIES AG
Score 2.6971664
Snippet The method involves providing a base material (100), and producing a laminated structure (133) on the base material, where the structure has a conductive...
SourceID epo
SourceType Open Access Repository
SubjectTerms BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
Title Verfahren zur Herstellung einer strukturierten Bodenelektrode in einem piezoelektrischen Bauelement
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080103&DB=EPODOC&locale=&CC=DE&NR=102006019505B4
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwhV1La8JAEB6sLW1vrW3pU_bQ5hZqNEZzCIW8CAUfFCveZE0mENRENFLw13d2Y_q4tLdlGYbdgXntznwD8EhZT8R5A1Wtg7Gqt9FUTWxyVeuaUUjRnKZz8aDf6xvBu_46aU8qkJa9MBIn9EOCI5JGhaTvubTXq-9HLFfWVm6eZwltZS_-yHKVMjvuirEFimtb3nDgDhzFcSzXU_pvFOs2JfSISR7f1g_gUITSAmvfG9uiM2X10634Z3A0JI5pfg6VCGtw4pTT12pw3Nt_etNyr3-bCwjHuI65qJBju-2aBSJ2w8WCFJah6OJjAg52nssxdMSY2RmZFXIs85zsJLIklWRLtkpwlxX7CaW3gpJvsagkv4Qn3xs5gUqnnX6JZ-p6vy_XuoJqmqV4DYyyN3LQmhE3o5ZOUjdNbnR4qMeNqKHFGN9A_W9et_8R3MFpUUEhCrPuoUq3xAdy0_msLmX7CTnKl00
link.rule.ids 230,309,786,891,25594,76903
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwhV1ZT8JAEJ4gGvFNUYMX7oP2rZFCOfrQmPQgVblikPBGlnaaNGBLoMSEX-_sFjxe9G2zmUx2J5nj250D4I5QT8B5BVWtiaGq19FQDaxyVWsZgU_RnKZz8aDf7TW8N_15XB_nIN7Vwsg-oR-yOSJplE_6nkp7vfh-xHJkbuXqYRrRVvLYHpqOskPHLTG2QHEs0x30nb6t2LbpuErvlWLdqmw9YpDHt_Q92G8SLJRwaWSJypTFT7fSPoaDAXGM0xPIBViEgr2bvlaEw-7205uWW_1bnYI_wmXIRYYc26yXzBOxG87npLAMRRUfE-1gZ6kcQ0eMmZWQWSHHMkvJTiKLYkn2zhYRbpJsPyJ4Kyj5GrNM8jO4b7tD21PptJMv8Uwc9_flaueQj5MYS8AIvZGD1hphNajpJHXD4I0m9_WwElS0EMMLKP_N6_I_glsoeMNuZ9J56r1cwVGWTSGStK4hTzfGG3LZ6bQs5fwJcsOaNw
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Verfahren+zur+Herstellung+einer+strukturierten+Bodenelektrode+in+einem+piezoelektrischen+Bauelement&rft.inventor=FATTINGER%2C+GERNOT&rft.inventor=DIEFENBECK%2C+KLAUS&rft.date=2008-01-03&rft.externalDBID=B4&rft.externalDocID=DE102006019505B4