Ellipsometer mit Blendenanordnung

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Bibliographic Details
Main Authors HOENIG, DIRK, EING, ANDREAS, VAUPEL, MATTHIAS
Format Patent
LanguageGerman
Published 29.06.2006
Subjects
COLORIMETRY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
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Bibliography:Application Number: DE20041012134