MEHRLAGENRESIST ZUR HERSTELLUNG VON STRUKTUREN MIT EBENEN BODENFLAECHEN

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Bibliographic Details
Main Authors SCHELLE,DETLEF,DD, FUCHS,JOERG,DD, BUSS,WOLFGANG,DD, PAULUHN,UWE,DD
Format Patent
LanguageGerman
Published 10.01.1991
Edition5
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Bibliography:Application Number: DD19890331027