VERFAHREN UND VORRICHTUNG ZUR ABSCHEIDUNG EINKRISTALLINER CVD-HALBLEITERSCHICHTEN

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Bibliographic Details
Main Authors KUEHNE,HEINZ,DD, SCHLOTE,JUERGEN,DD, RICHTER,FRANK,DD, MORGENSTERN,THOMAS,DD, SPERLING,ROLF,DD
Format Patent
LanguageGerman
Published 28.10.1981
Edition3
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Bibliography:Application Number: DD19800221973