Particle-optical device for change of trajectories of charged particles, particle-illumination device, projection system, and process for producing structural component

An inner electrode structure (37) partly transparent to particles partly encompasses a longitudinal axis with a radial gap and stretches along this axis. An outer electrode structure (29) partly encompasses the inner electrode structure with a radial gap and stretches along the longitudinal axis. A...

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Bibliographic Details
Main Author KIENZLE OLIVER DR
Format Patent
LanguageCzech
English
Published 13.11.2002
Edition7
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:An inner electrode structure (37) partly transparent to particles partly encompasses a longitudinal axis with a radial gap and stretches along this axis. An outer electrode structure (29) partly encompasses the inner electrode structure with a radial gap and stretches along the longitudinal axis. A source (47) of voltage supplies a potential difference between the inner and outer electrode structures. An Independent claim is also included for a method for producing a component with photolithographic capabilities.
Bibliography:Application Number: CZ20020001178