Anti-impact structure of MEMS galvanometer

• Main Authors: XIONG BIFENG, NI WEIJIAN
• Format: Patent
• Language: Chinese; English
• Published: 23.08.2024
• Subjects: ANALOGOUS ARRANGEMENTS USING OTHER WAVES; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES; MEASURING; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; RADIO DIRECTION-FINDING; RADIO NAVIGATION; TESTING; TRANSPORTING

The utility model relates to the technical field of micro electro mechanical systems, in particular to an anti-impact structure of a micro electro mechanical system (MEMS) galvanometer, which comprises an upper limit structure, an MEMS galvanometer and a lower limit structure, an MEMS galvanometer main body coincides with the upper limit structure and is positioned below the upper limit structure, the upper limit structure is used for limiting the displacement generated by the impact of the MEMS galvanometer main body from bottom to top, and the lower limit structure is used for limiting the displacement generated by the impact of the MEMS galvanometer main body from bottom to top. And the lower limiting structure is used for limiting the displacement of the MEMS galvanometer main body caused by impact from top to bottom and is positioned below the MEMS galvanometer main body, so that the problems that when an automobile runs on a rugged road surface, various vibrations and impacts are easily generated, the M