Ion source device and instrument

The utility model provides an ion source device and an instrument. The ion source device comprises an ionization box, a first magnet, a second magnet, a first filament assembly, a second filament assembly, a lead-out polar plate and a shielding polar plate; in the first direction, the first magnet a...

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Bibliographic Details
Main Authors LIU YAHUA, XIE MODAN, TANG CHAOFAN, LI GUOWEI, GUO CHUNHUA, YANG FUJIA, ZHUANG WENCUI, LI LIANG
Format Patent
LanguageChinese
English
Published 02.08.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:The utility model provides an ion source device and an instrument. The ion source device comprises an ionization box, a first magnet, a second magnet, a first filament assembly, a second filament assembly, a lead-out polar plate and a shielding polar plate; in the first direction, the first magnet and the second magnet are arranged on two opposite sides of the ionization box respectively, and the first magnet and the second magnet are opposite in magnetism; the first filament assembly is arranged between the first magnet and the ionization box, and the second filament assembly is arranged between the second magnet and the ionization box; the lead-out polar plate is arranged on one side of the ionization box along a second direction; the shielding polar plate is arranged between the leading-out polar plate and the ionization box. According to the ion source device provided by the utility model, the first filament assembly and the second filament assembly are arranged, so that when one of the filament assemblie
Bibliography:Application Number: CN202420119020U