Anti-diffraction vacuum coating equipment

• Main Authors: JIANG JIA, SHEN WEIZHENG, XU JIANZHU, LOU GUOMING, ZHENG BOHONG
• Format: Patent
• Language: Chinese; English
• Published: 09.07.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model relates to anti-diffraction vacuum coating equipment, which comprises a substrate frame, a vacuum coating device, a vacuum coating device and a vacuum coating device, and is characterized in that the substrate frame is used for loading a to-be-coated substrate; the settlement plate is arranged on one side of the base plate frame, and a coating chamber is formed between the settlement plate and the base plate frame; the driving wheel is matched with the edge of the base plate frame and is used for driving the base plate frame; and the blocking piece is used for blocking the two sides of the coating chamber and preventing target ions from escaping to the driving wheel. The blocking piece can prevent target ions from escaping to the driving wheel, and the possibility that the target ions escape to the driving wheel is reduced, so that pollutants on the surface of the driving wheel are reduced, the environment of a coating chamber is kept, and the process quality is improved. 本申请涉及一种防绕射的真空镀膜设备，包