Integrated circuit photoresist removing device

• Main Authors: YUAN JINGYU, ZHANG CONG, WANG ZHIBIN, ZHENG JIAN, WANG XUEGANG
• Format: Patent
• Language: Chinese; English
• Published: 14.06.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model relates to the technical field of integrated circuit degumming devices, in particular to an integrated circuit degumming device which comprises an installation base bottom plate, a piston installation hole is formed in the upper end of the installation base bottom plate, Pin needle mechanisms are arranged on the two sides of the lower end of the installation base bottom plate, each Pin needle mechanism comprises a plurality of Pin installation grooves, and the Pin installation grooves are formed in the upper end of the installation base bottom plate. And meanwhile, the plurality of Pin mounting grooves are not positioned on the same horizontal plane. According to the utility model, the lengths and sizes of the plurality of Pins are the same, and the included angle of 3 degrees is formed between the horizontal straight line formed by the plurality of Pin mounting grooves and the inclined straight line formed by the upper ends of the plurality of Pins, i.e., the tangent plane angle of the slop