Low-temperature coating equipment

• Main Authors: SHEN WEIZHENG, NIE JING, XU JIANZHU, LOU GUOMING, ZHENG BOHONG
• Format: Patent
• Language: Chinese; English
• Published: 04.06.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model discloses low-temperature coating equipment which is used for providing a vacuum environment and coating a workpiece. The low-temperature coating equipment comprises a first coating chamber provided with a first cathode target and an anti-adhesion plate, and a workpiece channel is arranged between the first cathode target and the anti-adhesion plate; the cooling chamber is provided with a water cooling plate; the second coating chamber is provided with a second cathode target and an anti-adhesion plate, and a workpiece channel is arranged between the second cathode target and the anti-adhesion plate; the first coating chamber, the cooling chamber and the second coating chamber are sequentially connected through gate valves. According to the embodiment, the coating process is divided into the first coating chamber and the second coating chamber to be executed respectively, and the cooling chamber is arranged between the first coating chamber and the second coating chamber to complete cooling,