Polycrystalline silicon cutting fluid filtering device

• Main Authors: XIA JINJING, XUE YUKUN, HE XIGE DURENG, GAO LICHUN, WANG JIANMIN, ZHANG WEI, QIN HAIDONG, HOU YONG
• Format: Patent
• Language: Chinese; English
• Published: 28.05.2024
• Subjects: PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TRANSPORTING

The utility model provides a polycrystalline silicon cutting fluid filtering device which comprises a liquid inlet pipe assembly and a liquid outlet pipe assembly, the liquid inlet pipe assembly comprises a first liquid inlet pipe, a filtering pipe and a second liquid inlet pipe, the inlet end of the first liquid inlet pipe is connected with a cutting machine tool water outlet, the outlet end of the first liquid inlet pipe is communicated with the inlet end of the filtering pipe, and the inlet end of the second liquid inlet pipe is communicated with the outlet end of the filtering pipe; a settling tank; wherein a movable pipe, a filter element and a first spring are arranged in the filter pipe, one end of the movable pipe is fixed to the first end of the filter pipe, the other end of the movable pipe is connected with the first end of the first spring, the second end of the first spring is fixed to the second end of the filter pipe, and when the length of the compressed first spring is larger than or equal to