Wafer magazine carrying device

• Main Authors: YUAN LINHANG, FANG JIANFENG, FENG YUAN, ZHENG ZHONGBIN, LI HANJUN
• Format: Patent
• Language: Chinese; English
• Published: 10.05.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model relates to the technical field of semiconductor wafer transportation, and discloses a wafer material box carrying device, which comprises a supporting plate, which is provided with a bearing surface parallel to a horizontal plane, and the bearing surface is used for bearing a wafer material box; the material box lock is fixed to the supporting plate and protrudes out of the bearing face, and the material box lock is used for being connected with a locking structure on the wafer material box in a clamped mode when the wafer material box is placed on the supporting plate so as to prevent the wafer material box from being separated from the bearing face of the supporting plate; the first driving mechanism is fixed on the supporting plate, and the first driving mechanism is in transmission connection with the material box lock; the first driving mechanism is used for driving the material box lock to be connected with the locking structure on the wafer material box in a clamped mode or driving th