Space alignment system

• Main Authors: HUANG YU, YAO ZHIQIN, PAN MINGHAO, CHEN QIUXING
• Format: Patent
• Language: Chinese; English
• Published: 26.04.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model discloses a space alignment system, which comprises an adjusting device, a laser head, a camera and a movable device, and is characterized in that the adjusting device is provided with a working plane, a chip carrier plate and a target substrate can be mounted on the adjusting device, and the adjusting device is used for driving the target substrate and the chip carrier plate to generate relative motion; the camera and the laser head are arranged at an interval in the direction parallel to the working plane; the adjusting device is mounted on the movable device, so that the adjusting device has a first detection position and a laser position; when the adjusting device is located at the first detection position, the chip carrier plate is in the shooting direction of the camera; when the adjusting device is located at the laser position, the chip carrier plate is in the laser emission direction of the laser. Through the arrangement, the laser head is prevented from influencing imaging of the c