High-precision semiconductor vacuum coating heating disc
The utility model provides a high-precision semiconductor vacuum coating heating disc, which comprises a heat transfer matching component, an electric heating component, an inner-layer shielding component, an inner-layer cooling component, an outer-layer shielding component, an outer-layer cooling c...
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Main Author | |
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Format | Patent |
Language | Chinese English |
Published |
16.04.2024
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Subjects | |
Online Access | Get full text |
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