High-precision semiconductor vacuum coating heating disc

• Main Author: XU HONGLIN
• Format: Patent
• Language: Chinese; English
• Published: 16.04.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model provides a high-precision semiconductor vacuum coating heating disc, which comprises a heat transfer matching component, an electric heating component, an inner-layer shielding component, an inner-layer cooling component, an outer-layer shielding component, an outer-layer cooling component and a switching positioning component, and is characterized in that an inner-layer coil pipe communicated with cold water equipment is arranged in an inner-layer cover plate; the inner-layer cover plate and the heat transfer base plate are cooled through the inner-layer coil pipe, so that the heating coil pipe containing the heating wire in the heat transfer base plate can adjust the temperature of the heat transfer base plate together with the inner-layer coil pipe, the adjusting speed is higher and more accurate, meanwhile, the outer-layer cover plate with the outer-layer coil pipe is arranged above the inner-layer cover plate, and the heat transfer effect is better. The heat insulation cavity is formed