Liquid medicine container and semiconductor cleaning equipment

• Main Authors: SHAN SI, JIN ZEWEN, XU YAO
• Format: Patent
• Language: Chinese; English
• Published: 26.03.2024
• Subjects: ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; BASIC ELECTRIC ELEMENTS; CLEANING; CLEANING IN GENERAL; CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; NATURALLY-OCCURRING ELECTRICITY; PACKAGES; PACKAGING ELEMENTS; PACKING; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; STATIC ELECTRICITY; STORING; TRANSPORTING

The utility model provides a liquid medicine container and a semiconductor cleaning device, and the liquid medicine container comprises a housing and an anti-corrosion layer. The shell is provided with an inner space used for containing liquid medicine. The shell comprises a barrel and a bottom plate; an opening communicated with the internal space is formed in the bottom of the barrel; the bottom plate is connected with an opening in the bottom of the barrel; the anti-corrosion layer covers the inner surfaces of the cylinder body and the bottom plate and is attached to the inner surfaces of the cylinder body and the bottom plate; the cylinder body and the bottom plate are both made of conductive materials; and the anti-corrosion layer is made of an anti-corrosion material. Therefore, the shell is made of the conductive material, and the anti-corrosion layer with good anti-corrosion performance covers each part of the inner surface of the shell, so that static charges generated between the liquid medicine and