Evaporation boat, coating equipment and battery production system

• Main Authors: WANG WEI, WANG YUELI, LI AIXIN
• Format: Patent
• Language: Chinese; English
• Published: 22.03.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model discloses an evaporation boat, coating equipment and a battery production system. The evaporation boat comprises an evaporation boat body, conductive matching surfaces used for being in conductive matching with electrodes are formed at the two ends of the evaporation boat body in the first direction respectively, the area of the conductive matching surfaces is larger than the projection area of the conductive matching surfaces on a first surface, the first surface is perpendicular to the first direction, and an included angle is formed between the first direction and the thickness direction of the evaporation boat body. The area of the conductive matching surfaces at the two ends of the evaporation boat body is larger than the projection area of the conductive matching surfaces on the first surface, and compared with the mode that the conductive matching surfaces completely adopt one plane and are powered on by electrodes, the contact area with the electrodes can be increased, the resistivit