Temperature and humidity control system

• Main Authors: LI ZHI, ZHANG LEI, XIA TIAN, LYU TENGFEI, LI BO
• Format: Patent
• Language: Chinese; English
• Published: 19.03.2024
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; CONTROLLING; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PHYSICS; REGULATING; SEPARATION; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TRANSPORTING

A temperature and humidity control system comprises air conditioning equipment and water cooling equipment, the temperature and humidity control system further comprises gas filtering equipment, the air conditioning equipment and the water cooling equipment are communicated with an external water supply system, the air conditioning equipment is communicated with the gas filtering equipment, and the water cooling equipment is communicated with the gas filtering equipment. The temperature and humidity control system regulates and controls the internal temperature and humidity of the direct-writing type photoetching equipment, the direct-writing type photoetching equipment comprises a shell, a base, a portal frame, a light source mechanism, an exposure lens, a motion platform and a supporting frame, the base bears the motion mechanism, the exposure lens is installed on the portal frame, and the light source mechanism is installed on the portal frame. The support frame is provided with at least two closed spaces