Back film structure for reducing EL blackening of double-sided PERC battery

• Main Authors: ZHU HAIRONG, XIA ZHONGGAO, GAO ZHIQIANG, PENG PING, LI XUJIE
• Format: Patent
• Language: Chinese; English
• Published: 15.03.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model discloses a back film structure for reducing EL blackening of a double-sided PERC battery, which relates to the technical field of solar battery equipment and comprises a double-sided PERC battery piece, after the double-sided PERC battery piece is subjected to texturing, diffusion, SE, etching and annealing processes, an aluminum oxide film, a silicon oxide film and a composite multilayer silicon nitride film are sequentially deposited on the back of the double-sided PERC battery piece, and the aluminum oxide film, the silicon oxide film and the composite multilayer silicon nitride film are sequentially deposited on the back of the double-sided PERC battery piece. The silicon oxide film can effectively reduce the defects of the back surface of a silicon wafer, improve the EL blackening problem caused by the H bond separation process of the high-refractive-index silicon nitride film, and improve the yield of battery pieces of a production line on the premise of ensuring that the photoelectri