Photomask standard sheet for particle test of photomask detector

• Main Authors: LIU YANHAO, WANG RUNDONG
• Format: Patent
• Language: Chinese; English
• Published: 06.02.2024
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The utility model provides a photomask standard sheet for particle test of a photomask detector, which comprises a standard sheet body, the standard sheet body is divided into N particle areas, particles with different sizes are arranged in the different particle areas, the particles with the Kth size are positioned in the Kth particle area, the number of the particles with the Kth size is multiple, and the number of the particles with the Kth size is multiple. The plurality of particles with the Kth size are arranged in the Kth particle area in an array mode. The photomask standard sheet disclosed by the utility model is divided into a plurality of particle areas, and the plurality of particle areas are provided with particles with different sizes, so that the basic purging capability and the detection capability of a photomask detector can be accurately evaluated, and the detection reliability is improved; and the position of each particle can be accurately positioned through particle detection result graph