Vertical cavity surface emitting laser chip

• Main Authors: ZHONG XINGLI, SU HUI, CHEN HUI, LI XIONG, ZHANG LIYU, LIN ZHONGXI
• Format: Patent
• Language: Chinese; English
• Published: 05.12.2023
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRICITY

The utility model discloses a vertical cavity surface emitting laser chip, which comprises a substrate, an epitaxial cylinder, an annular groove, a filling layer, a passivation layer, an oxidation hole and an electrode, and is characterized in that the epitaxial cylinder is arranged on the substrate, and the annular groove is arranged above the epitaxial cylinder to form an'island 'waveguide area surrounded by the annular groove; the annular groove is filled with a filling layer; the electrode comprises a P-surface electrode, an N-surface electrode and a connected electrode; the P-surface electrode is arranged above the island waveguide region and forms a concentric ring with the annular groove and the filling layer filled in the annular groove; the N-surface electrode is arranged above the substrate and is adjacent to the epitaxial cylinder; the connected electrode is isolated from the epitaxial cylinder through the passivation layer, and is electrically connected with the P-surface electrode at the windowin