Silicon wafer synchronous conveying and material chasing device

• Main Authors: LIU TAORONG, LIU LEI, SHEN YUYI, LI JIE, ZHAO RUIGANG
• Format: Patent
• Language: Chinese; English
• Published: 20.10.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PACKING; PERFORMING OPERATIONS; PHYSICS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TESTING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

The utility model discloses a synchronous conveying and material-chasing device for silicon wafers, which comprises at least two conveying lines, each conveying line comprises a plurality of conveying units, the plurality of conveying units are sequentially connected along the same straight line, each conveying unit is provided with a position sensor, and each conveying unit is provided with an independent driving mechanism. Two conveying lines are arranged to be a plurality of conveying units with position sensors, and when a plurality of silicon wafers are simultaneously conveyed on the two conveying lines respectively and have position difference, the conveying line with the lagged position of the silicon wafer changes at a slow speed at a fixed long distance to catch the same position of the silicon wafer on the other conveying line; and then the two conveying lines operate at the same speed, and position compensation material chasing is carried out for multiple times through a plurality of conveying unit