Infrared focal plane detector

The utility model provides an infrared focal plane detector. The infrared focal plane detector comprises a plurality of photosensitive units, an indium column array and a silicon readout circuit, the plurality of photosensitive units are connected with the silicon readout circuit through the indium...

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Bibliographic Details
Main Authors BAI XIEHUI, WU HEXIN
Format Patent
LanguageChinese
English
Published 25.08.2023
Subjects
BASIC ELECTRIC ELEMENTS
COLORIMETRY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
SEMICONDUCTOR DEVICES
TESTING
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Summary:The utility model provides an infrared focal plane detector. The infrared focal plane detector comprises a plurality of photosensitive units, an indium column array and a silicon readout circuit, the plurality of photosensitive units are connected with the silicon readout circuit through the indium column array; a light receiving structure is arranged at the position, corresponding to each photosensitive unit, of one side of the light receiving face of each photosensitive unit, each light receiving structure is of an inward-concave structure with the light receiving face facing the direction of the corresponding photosensitive unit, and the maximum width of the interior of each inward-concave structure is larger than the size of the corresponding opening. The preparation method of the light-receiving structure comprises the following steps: coating a layer of photoresist on the surface of a light-receiving surface of the photosensitive unit, and determining the position of the light-receiving structure on the
Bibliography:Application Number: CN202320198708U