Wafer position detection device

• Main Authors: TIAN WENKANG, WANG ZHAOFENG
• Format: Patent
• Language: Chinese; English
• Published: 11.08.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model discloses a wafer position detection device which comprises a mechanical arm and a detection mechanism, a detection hole is formed in the mechanical arm, and a detection signal sent by the detection mechanism can penetrate through the detection hole; when the manipulator supports the wafer, the wafer can shield part of the detection signals; once the wafer deviates from the preset position on the manipulator, no matter whether the wafer is in front, back, left or right relative to the preset position, the wafer is exposed in the detection hole and the part used for shielding the detection signal is correspondingly increased or reduced, and at the moment, the shielding amount of the detection signal is increased or reduced; when the actual shielded amount of the detection signal is different from the preset shielded amount, the detection mechanism can determine that the wafer is not in the preset position. 本申请公开了一种晶圆位置检测装置，包括机械手和检测机构，机械手上设有检测孔，检测机构发出的检测信号能够穿过检测孔；当机械手承托晶圆时，晶圆能够遮挡部分检测信号；一旦晶圆在机械