Wire collator for wafer processing equipment cabinet

• Main Authors: ZHAO RUIXIAN, SIM SANG-KYU, KIM KYEONG-SOO, IM SEUNG-HYEOK, NA JEONG-HEUM, PARK CHUL-KWAN, OH TAE-YOON, YUN IN-SANG, KIM JAE-HOON
• Format: Patent
• Language: Chinese; English
• Published: 21.07.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; GENERATION; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINEDOPTICAL AND ELECTRIC CABLES OR LINES; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model provides a wire collator for a wafer processing equipment cabinet, which belongs to the technical field of deposition and comprises a mounting rack mounted on a cabinet frame and a guide hole arranged on the mounting rack and used for a wire to penetrate through and extend. The mounting frame comprises a guide beam and fixing parts which are arranged at two ends of the guide beam and used for connecting a cabinet frame; at least two guide holes are formed in the guide beam; the guide holes include at least one gas conductor guide hole and at least one cable conductor guide hole. According to the utility model, the gas wire and the cable wire are accommodated in the different guide holes, and the gas wire and the cable wire are separated through one wire collator, so that the wire collating efficiency is improved, the risks of wire crossing and short circuit among the wires are reduced, and the technical effect of improving the wire maintenance efficiency is further achieved. 本实用新型提供一种用于晶圆处理设