Wafer processing degumming device

• Main Authors: YIN WANG, YIN KANG, NI YULIN, XU XINZHI
• Format: Patent
• Language: Chinese; English
• Published: 14.07.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CLEANING; CLEANING IN GENERAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; TRANSPORTING

The utility model belongs to the technical field of wafer processing, and particularly relates to a wafer processing degumming device which comprises a supporting column. A workbench is fixedly connected to the tops of the supporting columns, a movable assembly is arranged at the top of the workbench and fixedly connected to the top of the workbench, the movable assembly comprises a fixed seat, the bottom of the fixed seat is fixedly connected to the top of the workbench, and a fan and a telescopic rod are arranged at the top of the fixed seat; the bottom of the telescopic rod and the bottom of the fan are both fixedly connected to the top of the fixing base, one end of the telescopic rod is fixedly connected with an inclined plate, two heating plates are arranged in the fixing base, the side walls of the two heating plates are fixedly connected into the fixing base, and the top of the workbench is slidably connected with a connecting plate. The top of the connecting plate is provided with a wafer, and the bo