Multifunctional machining table for magnetron sputtering coating

• Main Authors: GAO YAN, YE DONGGUO, FU ZHIJIANG
• Format: Patent
• Language: Chinese; English
• Published: 07.07.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model discloses a multi-functional machining table for magnetron sputtering coating, which relates to the technical field of machining tables and comprises a collecting box, a moving component is mounted at the bottom of the collecting box and used for transferring the position of the collecting box, a hydraulic jack is fixedly mounted at the top of the collecting box, and a first table plate is fixedly mounted at the output end of the hydraulic jack. Two rectangular frame plates are fixed to the lower surface of the first table plate, sliding plates are slidably inserted into the rectangular frame plates, bolts are arranged at the bottoms of the rectangular frame plates in a penetrating mode, and the rectangular frame plates are in threaded connection with the bolts. The distance between the second table plates and the first table plate can be adjusted by pulling the sliding plate to slide in the rectangular frame plate, so that the first table plate is matched with the two second table plates to