Vacuum damping device for electron microscope
The utility model provides a vacuum damping device for an electron microscope, which belongs to the technical field of damping of vacuum devices and comprises an electron microscope sample chamber, an electron microscope sample chamber and a damping device. The bottom end of the electron microscope...
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Main Author | |
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Format | Patent |
Language | Chinese English |
Published |
04.07.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The utility model provides a vacuum damping device for an electron microscope, which belongs to the technical field of damping of vacuum devices and comprises an electron microscope sample chamber, an electron microscope sample chamber and a damping device. The bottom end of the electron microscope sample chamber is connected with the vacuum equipment through a damping structure; and the damping structure comprises a damping corrugated pipe, and a damping vibration attenuation ring and a vibration attenuation adjusting ring which are arranged on the outer side of the damping corrugated pipe. The vacuum damping device for the electron microscope provided by the utility model is suitable for placing an electron microscope sample chamber of a sample to be detected, the electron microscope sample chamber is connected with vacuum equipment through a damping structure, and the damping structure comprises a damping corrugated pipe, and a damping vibration attenuation ring and a vibration attenuation adjusting ring w |
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Bibliography: | Application Number: CN202223483763U |