Semiconductor chip manufacturing vacuum equipment

The utility model is suitable for the technical field of semiconductor chip manufacturing, and discloses semiconductor chip manufacturing vacuum equipment, which comprises a vacuum manufacturing equipment body, a hinge is arranged on the right side of the surface of the vacuum manufacturing equipmen...

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Bibliographic Details
Main Author CHENG TIANRAN
Format Patent
LanguageChinese
English
Published 06.06.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The utility model is suitable for the technical field of semiconductor chip manufacturing, and discloses semiconductor chip manufacturing vacuum equipment, which comprises a vacuum manufacturing equipment body, a hinge is arranged on the right side of the surface of the vacuum manufacturing equipment body, a box door is arranged on the hinge, a cleaning shell is arranged on the right side of the vacuum manufacturing equipment body, and a vacuum pump is arranged on the cleaning shell. An air inlet pipe is arranged at the top of the cleaning shell, a fan is mounted in the air inlet pipe, a placement groove is formed in the vacuum manufacturing equipment body, two groups of wheel grooves are formed in the left side of the interior of the placement groove, a sliding groove is formed in the right side of the interior of the placement groove, and a sliding plate and a stabilizing rod are arranged in the sliding groove; a threaded groove is formed in the middle of the sliding plate. According to the utility model, t
Bibliography:Application Number: CN202222950193U