Wafer conveying box

• Main Authors: WU KANGQI, MIN WON
• Format: Patent
• Language: Chinese; English
• Published: 30.05.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model provides a wafer transmission box, which comprises a wafer transmission box main body and a pull-out baffle plate device, and is characterized in that the side wall of the wafer transmission box main body is provided with a light-transmitting window; the drawing type baffle device comprises sliding groove sets and movable baffles, the sliding groove sets are fixed to the side wall provided with the light-transmitting window, the movable baffles are placed in the sliding groove sets, and the sliding groove sets are located on the two sides of the light-transmitting window. According to the wafer transmission box, the corrosion rate of the tungsten plug of the complementary metal oxide semiconductor product after the tungsten chemical mechanical grinding is reduced, the production efficiency is improved, the roughness of the surface of the tungsten plug after the tungsten chemical mechanical grinding is effectively reduced, the yield of wafers is improved, the defect proportion of the wafers i