Wafer grinding device
The utility model provides a wafer grinding device. The wafer grinding device comprises a base; the workbench is arranged on the first surface of the base and used for placing a wafer to be ground; the grinding part is used for grinding the wafer placed on the workbench; the at least three supportin...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
26.05.2023
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Subjects | |
Online Access | Get full text |
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Abstract | The utility model provides a wafer grinding device. The wafer grinding device comprises a base; the workbench is arranged on the first surface of the base and used for placing a wafer to be ground; the grinding part is used for grinding the wafer placed on the workbench; the at least three supporting pieces comprise at least one fixed supporting piece and at least one adjustable supporting piece; the at least three supporting pieces are all located at the edge position of the second surface of the base and are not located on the same straight line. The adjustable supporting piece comprises a driving piece and a lifting assembly, and the driving piece is used for driving the lifting assembly to ascend and descend so that the inclination angle of the workbench can be adjusted through ascending and descending of the lifting assembly. According to the invention, the adjustment mode of the workbench is changed from manual adjustment to automatic adjustment, the inclination angle of the workbench is convenient to c |
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AbstractList | The utility model provides a wafer grinding device. The wafer grinding device comprises a base; the workbench is arranged on the first surface of the base and used for placing a wafer to be ground; the grinding part is used for grinding the wafer placed on the workbench; the at least three supporting pieces comprise at least one fixed supporting piece and at least one adjustable supporting piece; the at least three supporting pieces are all located at the edge position of the second surface of the base and are not located on the same straight line. The adjustable supporting piece comprises a driving piece and a lifting assembly, and the driving piece is used for driving the lifting assembly to ascend and descend so that the inclination angle of the workbench can be adjusted through ascending and descending of the lifting assembly. According to the invention, the adjustment mode of the workbench is changed from manual adjustment to automatic adjustment, the inclination angle of the workbench is convenient to c |
Author | SU YANDONG REN RUI |
Author_xml | – fullname: REN RUI – fullname: SU YANDONG |
BookMark | eNrjYmDJy89L5WQQDU9MSy1SSC_KzEvJzEtXSEkty0xO5WFgTUvMKU7lhdLcDEpuriHOHrqpBfnxqcUFicmpeakl8c5-RoaWBuamxoamoaHGRCkCAHheI4c |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences |
DocumentTitleAlternate | 晶圆研磨装置 |
ExternalDocumentID | CN219075315UU |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_CN219075315UU3 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 14:27:09 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | Chinese English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_CN219075315UU3 |
Notes | Application Number: CN202223377825U |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230526&DB=EPODOC&CC=CN&NR=219075315U |
ParticipantIDs | epo_espacenet_CN219075315UU |
PublicationCentury | 2000 |
PublicationDate | 20230526 |
PublicationDateYYYYMMDD | 2023-05-26 |
PublicationDate_xml | – month: 05 year: 2023 text: 20230526 day: 26 |
PublicationDecade | 2020 |
PublicationYear | 2023 |
RelatedCompanies | SHAOXING SEMICONDUCTOR MANUFACTURING CO., LTD |
RelatedCompanies_xml | – name: SHAOXING SEMICONDUCTOR MANUFACTURING CO., LTD |
Score | 3.6033196 |
Snippet | The utility model provides a wafer grinding device. The wafer grinding device comprises a base; the workbench is arranged on the first surface of the base and... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING |
Title | Wafer grinding device |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230526&DB=EPODOC&locale=&CC=CN&NR=219075315U |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3NS8MwFH_MKepN50SdShHpreiSJvZShKUtQ1g3ZNXdRppmcx50dBXBv96X0DlPu4UEHskLv_eZ9wJwW_gPEuVe4RHSVZ5fBMy0vMULUTlTgZSILxMaGKS8n_lPEzZpwPu6Fsb2Cf22zRERUQrxXll5vdwEsSL7tnJ1ly9w6vMxGYeRW3vHaE8zwt2oF8ajYTQUrhChSN302QATlSPtsmwHdo0Zbfrsxy89U5Wy_K9SkiPYGyG1j-oYGj9vLTgQ65_XWrA_qBPeOKyxtzqB9quc6dKZlwtbiOIU2oC8DTdJPBZ9D-lP_w4zFelmKxk9hSZ6-foMHJJrxALlnEniayUDqtCVuZ9xSdAGI_QcOlsIXWxd7cCh4Y1JehN-Cc2q_NJXqEur_Noy4RceUnYV |
link.rule.ids | 230,309,786,891,25594,76903 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwY2BQSTExTwSWeym6RkaGybomKRamoCNvgRGSnGSabJGYCMxfoKEBXz8zj1ATrwjTCCaGLNheGPA5oeXgwxGBOSoZmN9LwOV1AWIQywW8trJYPykTKJRv7xZi66IG7R0D29OmRmZqLk62rgH-Lv7Oas7Ots5-an5BoIwJrByNDU1DmRlYzYFdQnBXKcwJtCulALlKcRNkYAsAmpZXIsTAVJUhzMDpDLt5TZiBwxc64Q1kQvNesQiDaHhiWmqRQnpRJngjikJKKiiTizIoubmGOHvoAs2Ph3sm3tkP4ZRQYzEGFmAvP1WCQcEoKRWYF4zNzEwTjUxSkxMtjJOBXRmDNLNEI2AbzMhYkkEaj0FSeGXlGTg9Qnx94n08_bylGbhA4QSaADcyk2FgKSkqTZUF1qslSXLgAAEAyEV4_w |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Wafer+grinding+device&rft.inventor=REN+RUI&rft.inventor=SU+YANDONG&rft.date=2023-05-26&rft.externalDBID=U&rft.externalDocID=CN219075315UU |