Heat treatment device and preparation equipment of solar cell

• Main Authors: DONG GANGQIANG, JIANG HAO, IKUSAO, WANG QI, RAN XIAOCHAO, ZHAO YU
• Format: Patent
• Language: Chinese; English
• Published: 19.05.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMISTRY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUSMETALS OR ALLOYS; MAKING METAL MALLEABLE BY DECARBURISATION, TEMPERING OR OTHERTREATMENTS; METALLURGY; METALLURGY OF IRON; MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; SEMICONDUCTOR DEVICES

The utility model discloses a heat treatment device and preparation equipment of a solar cell, and belongs to the field of solar cells. A heat treatment device is used for preparation equipment of solar cells and comprises a feeding chamber, a process chamber and a discharging chamber which are arranged in the material flowing direction. The discharging end of the feeding chamber is connected with the feeding end of the process chamber through a first gate valve, and the discharging end of the process chamber is connected with the feeding end of the discharging chamber through a second gate valve; the feeding chamber, the process chamber and the discharging chamber are respectively connected with a vacuumizing device through pipelines, and regulating valves are arranged on the pipelines; and the process chamber is communicated with a protective gas source through a gas conveying pipeline and is used for injecting protective gas into the feeding chamber. According to the invention, the problem that the battery