Large-line-width line scanning photoetching light source module

The utility model discloses a large-linewidth-size line scanning photoetching light source module which comprises an LED light source, a second vertical lens arranged at the left end of the light uniformizing mirror group, a TIR lens arranged at the left end of the second vertical lens, and a digita...

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Bibliographic Details
Main Authors ZHOU YAXING, YOU ZHENGJIE, ZHUANG YIZHEN, TANG XIAOSHENG
Format Patent
LanguageChinese
English
Published 28.04.2023
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:The utility model discloses a large-linewidth-size line scanning photoetching light source module which comprises an LED light source, a second vertical lens arranged at the left end of the light uniformizing mirror group, a TIR lens arranged at the left end of the second vertical lens, and a digital micro-reflector arranged at the left end of the TIR lens. The large-linewidth-size line scanning photoetching light source module overcomes the defects in the prior art, and has the advantages that the light uniformizing mirror group is arranged at the left end of the LED light source, the second vertical lens is arranged at the left end of the light uniformizing mirror group, the TIR lens is arranged at the left end of the second vertical lens, and the digital micro-reflector is arranged at the left end of the TIR lens. A second vertical lens is arranged, the second vertical lens is arranged at the left end of a light uniformizing mirror set, high-uniformity light spots are generated when light enters the light
Bibliography:Application Number: CN202222897764U