Quick-release auxiliary anode ring of vacuum ion plating equipment

• Main Authors: BAI CHUNYANG, ZHAO JIANQIANG, WANG QUANYI
• Format: Patent
• Language: Chinese; English
• Published: 28.03.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model belongs to a quick-release auxiliary anode ring of vacuum ion plating equipment, which comprises an auxiliary anode base (1) and is characterized in that three ceramic spring columns (2) are uniformly distributed on the inner left side, the inner right side and the inner lower side of the auxiliary anode base (1); three slide way locking grooves (3-1) are uniformly distributed on the left side, the right side and the lower side of the auxiliary male ring (3); a slide way locking groove (3-1) in the auxiliary male ring (3) is aligned with the ceramic spring column (2) to rotate, so that the auxiliary male ring (3) is fixed on the auxiliary male base (1); the device is simple in structure, ingenious in design, reasonable in layout, convenient and fast to disassemble and assemble, capable of improving working efficiency, reducing maintenance time and accelerating production rhythm, and low in manufacturing cost. 本实用新型属于一种真空离子镀膜设备快拆式辅阳环，包括辅阳底座(1)，其特征在于辅阳底座(1)的内左侧、内右侧、内下侧均布三个陶瓷弹簧柱(2)；在辅阳环(3)左侧、右侧