Low-loss MEMS optical switch

• Main Authors: DENG WEISONG, LI YANG, CHEN LIXUN, XU YUNBING, XUE TINGYU
• Format: Patent
• Language: Chinese; English
• Published: 24.03.2023
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The utility model discloses a low-loss MEMS optical switch. The low-loss MEMS optical switch comprises a shell, and a two-dimensional optical fiber array, a gradient refractive index lens and an MEMS micromirror which are sequentially arranged and packaged in the shell, the two-dimensional optical fiber array comprises an optical fiber input port and a plurality of optical fiber output ports; according to the MEMS optical switch, the combined lens comprising the gradient refractive index lens is adopted to replace an existing single collimating lens, the aberration of an optical system is greatly optimized, meanwhile, the transverse expansion size of the optical fiber array is improved, and the small-size high-performance MEMS optical switch with low insertion loss and high port number is achieved. 本实用新型公开一种低损耗的MEMS光开关，包括壳体和依次排列封装在壳体内部的二维光纤阵列、渐变折射率透镜和MEMS微镜；所述二维光纤阵列包括一个光纤输入端口和多个光纤输出端口；本实用新型采用包含渐变折射率透镜的组合透镜来代替现有的单准直透镜，极大优化光学系统像差的同时，提升了光纤阵列的横向扩展尺寸，实现低插损高端口数目的小尺寸高性能MEMS光开关。