Line scanning Micro LED light intensity detection optical module

• Main Authors: ZHOU YAXING, YOU ZHENGJIE, ZHUANG YIZHEN, TANG XIAOSHENG
• Format: Patent
• Language: Chinese; English
• Published: 24.02.2023
• Subjects: COLORIMETRY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; RADIATION PYROMETRY; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

The utility model relates to the technical field of optical detection, in particular to a line scanning Micro LED light intensity detection optical module, which comprises an LED light source, a light equalizing mirror group, a first lens group, a spectroscope group, a Micro LED wafer, a second lens group, a CCD (charge coupled device) lens group and a CCD sensor, and the LED light source sequentially passes through the light equalizing mirror group, the first lens group, the spectroscope group, the Micro LED wafer, the second lens group, the CCD lens group and the CCD sensor. According to the utility model, the defects in the prior art are overcome, the light source is adjusted into parallel and uniform light spots through the arrangement of the light equalizing mirror group, and compared with the mode that the light source is directly irradiated to a MicroLED wafer for detection, the light source output uniformity can be effectively ensured, so that the CCD sensor can more completely receive light rays, the