Wafer carrying arm

• Main Authors: HU JINGXIANG, LIU QUANYI, HU CANHUI
• Format: Patent
• Language: Chinese; English
• Published: 21.02.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model provides a wafer carrying arm. The wafer carrying arm comprises a Z-axis driving assembly, a rotation driving assembly, an X-axis driving assembly, a first arm, a second arm and a wafer supporting plate, the rotation driving assembly is fixedly connected with the Z-axis driving assembly, the first arm is fixed at the top of the rotation driving assembly, the second arm is slidably mounted at the top of the first arm, and the wafer supporting plate is slidably mounted at the top of the second arm; a first synchronous wheel is arranged on an output shaft of a third rotary driving part of the X-axis driving assembly, a second synchronous wheel is arranged on a first arm, a first synchronous belt is wound around the first synchronous wheel and the second synchronous wheel, a first connecting block is fixedly arranged on the first synchronous belt, and the first connecting block is further fixedly connected with a second arm. A third synchronous wheel and a fourth synchronous wheel are arranged a