Packaging structure of silicon drift detector

• Main Authors: HOU WEIJIE, ZHAO ZHENYANG, FAN MAOJUN, ZHAO YUXIN, ZHAO YINGBO
• Format: Patent
• Language: Chinese; English
• Published: 03.02.2023
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; SEMICONDUCTOR DEVICES; TARIFF METERING APPARATUS; TESTING

The utility model discloses a packaging structure of a silicon drift detector. A collimator is connected with a silicon drift detection element in an accommodating cavity of a shell; the amplifier is electrically connected with the silicon drift detection element and is used for amplifying an output signal of the silicon drift detection element; the ceramic base is connected with the silicon drift detection element and is arranged on one side, far away from the collimator, of the silicon drift detection element; wherein the surface of the ceramic base is provided with at least two grooves, absolute pressure sensors and/or temperature sensors are embedded in the grooves, and the absolute pressure sensors and the temperature sensors are used for outputting pressure signals and temperature signals to the outside; the refrigerator is arranged at one end, far away from the silicon drift detection element, of the ceramic base and is used for keeping the temperature in the shell; according to the silicon drift detec