Long filament ionization mechanism

The utility model belongs to a long filament ionization mechanism, which comprises a filament 1, and is characterized in that a filament binding post 4 and an anode binding post 3 are fixed on a main square flange 8 and are separated by a ceramic insulating part 7, two ends of the filament 1 are con...

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Bibliographic Details
Main Authors SUN YINGBIN, WANG JUNBO, BAI CHUNYANG
Format Patent
LanguageChinese
English
Published 13.01.2023
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Summary:The utility model belongs to a long filament ionization mechanism, which comprises a filament 1, and is characterized in that a filament binding post 4 and an anode binding post 3 are fixed on a main square flange 8 and are separated by a ceramic insulating part 7, two ends of the filament 1 are connected to the filament binding post 4, an anode 2 is connected to the anode binding post 3, and a filament power supply 5 is connected to the filament binding post 4. The beneficial effects of the utility model are that the structure is simple, one filament can cover the whole vacuum chamber, the ionization is uniform, the maintenance is convenient, and the cost can be greatly reduced. 本实用新型属于一种长灯丝离化机构,包括灯丝1,其特征在于灯丝接线柱4和阳极接线柱3固定在主体方法兰8上,通过陶瓷绝缘件7隔开,灯丝1两端接在灯丝接线柱4上,阳极2接在阳极接线柱3上,灯丝电源5接在灯丝接线柱4上,阳极电源6分别接在其中一个阳极接线柱3和一个灯丝接线柱4上,本实用新型的有益效果是:结构简单,一根灯丝可覆盖整个真空室,离化均匀,维护方便且可大幅降低成本。
Bibliography:Application Number: CN202222569310U