Film thickness monitoring system and optical coating device

• Main Authors: LONG RULEI, ZHANG YONGLIN, LYU QIMENG, XU BO, ZHANG XINYIN, LI WEITAO, ZHAN DAWEI
• Format: Patent
• Language: Chinese; English
• Published: 06.01.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; METALLURGY; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TESTING

The utility model discloses a film thickness monitoring system and an optical coating device. The film thickness monitoring system comprises a light source, a light projection unit, a test piece, a light receiving unit and a first detection module, the test piece is arranged on the substrate disc, the light source is connected with the light projection unit, the light receiving unit is connected with the first detection module, the light projection unit emits a first detection light signal to the test piece, and the light receiving unit receives a second detection light signal reflected by the test piece. The film thickness monitoring system adopts a back reflection type film thickness detection mode, utilizes the light projection unit to emit the first detection light signal, and performs film thickness detection according to the second detection light signal reflected by the test piece, so that the film coating precision is ensured, meanwhile, the placement position of the test piece in the film coating cav