Radio frequency power supply matcher adopting magnetic field to drive variable capacitor

• Main Authors: ZHANG DECAI, HUANG YING, HONG JINGWEI
• Format: Patent
• Language: Chinese; English
• Published: 03.01.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INDUCTANCES; MAGNETS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; TRANSFORMERS

The utility model discloses a radio frequency power supply matcher adopting a magnetic field to drive a variable capacitor, which relates to the technical field of radio frequency power supply matchers, and comprises a detection board, the detection board is connected with the output end of a radio frequency power supply, and the detection board is connected with a control board through a phase detection signal and an amplitude detection signal. The other side of the detection plate is connected with an inductor; the control board is connected to the two ends of the inductor through the first magnetic field driving variable capacitor and the second magnetic field driving variable capacitor. According to the utility model, the detection board is adopted to detect input signals, detected amplitude signals and phase signals are transmitted to the control board, the control board adjusts the received input signals, enlarges the radio frequency matching impedance range of the inductor, and adjusts the position of